The SCHMID 7500 Series is designed for air or controlled atmosphere applications of up to 1000°C.
The horizontal conveyorized dryer KU400 is constructed according to the modular system, which allows us to adapt the dryer to your individual requirements.
The SCHMID 8500 Series is designed for applications of up to 1050°C.
Tube furnace for POCL3 and CO-diffusion
The 5500 series APCVD system is well suited for low cost high-volume processing for all cell architectures requiring single or multi-layer dielectric thin film deposition.